Quartz Glass Plates0 pages

Quartz Glass Plates
Applications
Etch tanks, windows, support plates,
pedestals for reaction chambers, cover plates

Characteristics
High temperature stability, corrosion resistant,
transparent or opaque
Heraeus Quarzglas provides transparent quartz glass
plates with very good transmission and opaque plates with
high reflectivity. Transparent quartz glass plates are offered
in a wide variety of grades, from cost efficient direct
drawn plates, to plates cut from various solid materials.
They are used for instance to produce etch tanks or as
windows and cover plates for various applications.
Heraeus Quarzglas’ grades are primarily differentiated by
the production route and the chemical impurity characteristics. Therefore, transparent quartz glass plates are divided into two larger groups: flame fused and electrically
fused. In each group a variety of grades is available, each
with individual advantages for specific applications.

In addition to transparent quartz glass Heraeus has a unique
opaque material with exceptionally low transmission, which
is also available in the form of plates (OM 100). It is
made in a ceramic process and frequently used for its
heat or electromagnetic blocking characteristics.
Heraeus Quarzglas cuts quartz glass solids into plates
using band and wire saws. While band saws allow larger
sizes to be cut, wire sawn plates have a smoother surface
finish and excellent parallelism.
Depending on the size, specific surface finishes can be
selected: cut or drawn, ground or polished. In addition to an
improved surface finish, Heraeus Quarzglas offers to cut plates to customized shapes through water jet or laser cutting.

Plate cross section

Direct drawn plates
Length (mm): Standard: 1500; Max. length: 2500
Thickness (mm)
standard
2,0
2,3
2,5
3,0
3,5
4,0
5,0
6,0
7,0
8,0

Width (mm)
as drawn
190
220
230
250
260
270
285
320
330
335

with specified
thickness tolerances
130
150
170
200
210
220
250
280
290
300

w1: as drawn
w2: with specified
thickness tolerances

w2
w1

Multi step plates
Wire saw cut

Standard cut
(Water jet)

Precision cut
(Laser)

Thickness (mm)

2 - 20

3 - 150

Up to 8

Max. plate size (mm)

500 x 600

3000 x 2000

1000 x 1000