Monolithic Rotary Sputtering Targets0 pages

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Maximum Productivity

Monolithic Rotary
Sputtering Targets

As the leading supplier of planar and rotary sputtering targets for thin-film solar cells and flat panel displays, PLANSEE
provides innovative solutions for optimum sputtering results and an efficient coating process.
The newest development: PLANSEE monolithic rotary targets made of 100 % molybdenum have proven their efficiency to
deposit thin films for the solar cell production. Their design without backing tube pays off. Field tests with different forms and
dimensions show the following advantages:
- Fully dense material (leak-proof) because of special deformation process
- Highest mechanical strength
- Improved thermal conductivity for a faster coating process
- Highest usage rates of 75 % and more
- Maximum cost efficiency

Monolithic PLANSEE rotary target before sputtering

Monolithic PLANSEE rotary target after the sputtering process