RGH25F UHV, RGH20F UHV0 pages

Data sheet
L-9517-9164-04-C

RGH25F UHV, RGH20F UHV
Ultra high vacuum compatible readhead systems

Renishaw’s vacuum
compatible optical
encoders offer all the
benefits of the
established RG2 linear
and angle encoder
systems; non-contact
patented filtering optical
scheme, high accuracy
and high speed.
Renishaw’s vacuum range has been
specially constructed from clean UHV
compatible materials and adhesives
to give low outgassing rates and a
clean RGA. These readheads also
feature reduced current consumption to
minimise heat dissipation.
The RGH20F UHV is designed for use
with Renishaw’s 20 µm RESR angle
encoder and high accuracy RSLR linear
scale to provide precision feedback for
motion in UHV environments.

The RGH20F UHV and RGH25F UHV
readheads are used with the REF interface
which incorporates automatic gain control
and unique self-tuning adaptive electronics.
Combined with filtering optics, these
ensure excellent signal integrity and
low cyclic error.
The REF interfaces are available with
resolution options of 5 µm to 5 nm, as well
as 1 Vpp analogue output.
An integral tri-coloured set-up LED
enables quick and easy installation.
All of these readheads are supplied with
an RFI screened UHV compatible cable
as standard.

•t Clean RGA
•t Low outgassing rates
•t High bake-out temperature
of 120 °C
•t Low power consumption
readheads
•t Non-contact open optical
system
•t Resolution to 5 nm
•t Low cyclic error, <50 nm
•t Self-tuning adaptive
electronics give high
accuracy and long-term
reliability
•t Reads RGS20-S tape
scale, 20 µm RESR
angle encoder or
RSLR linear scale