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HPH-300 Hot chuck for 300mm wafer0 pages
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| UNfEMP |
| Model HPH-300__ Hot chuck for up to 300mm wafer with vacuum and with or without lift pins |
| 3 process parameter are programmable heat up rate Օ lift pin up or down vacuum on or off |
| lor up to 300mm (12") wafer size heated area: 360mm diameter torn p^u lure up to 250 "C high precision Eurotherm controller (model 24161 time controlled lift pins (free movement ot the lift-pins) RS-232 interface for easy programming on PC |
