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SEM-Closure? Total environmental protection of scanning electron microscopes0 pages
VIBRATION CONTROL
NEW From TMC!
TM
NEW From TMC!
SEM-Closure
™
VIBRATION CONTROL
For Total Environmental Protection
VIBRATION CONTROL
SEM-Closure™ is an acoustic
™
enclosure designed specifically
™
for scanning electron microscopes
For total environmental protection of with TMC’s
(SEMs). Together
scanning electron microscopes Protection
For Total Environmental (SEMs) platform and
SEM-Base™ floor
Mag-NetX™ magnetic field cancelSEM-Closure™ is an acoustic enclosure designed specifically acoustic
SEM-Closure™ is an for
lation, SEM-Closure provides
scanning electron microscopes (SEMs). enclosurewith TMC’s SEM-Base™
Together designed specificallya
total environmental solution to
™
floor platform and Mag-NetX magnetic field cancellation, SEM-Closure™
for scanning electron microscopes
protect sensitiveSEMs from
provides a total environmental solution to protectsensitive with TMC’s all
(SEMs). Together SEMs from
outside interference.
all outside interference.
SEM-Base™ floor platform and
SEM-Closure is designed
Mag-NetX™ magnetic field cancelSEM-Closure is designed to accommodate SEM-Base, an active to
SEM-Closure front view with 12" module on left side,
accommodate SEM-Base, an active piezoelectric and Mag-NetX in a a
piezoelectric vibration cancellation floorlation, SEM-Closure cancellation
platform, vibration provides
24" module on right side. Modularity accommodates various
floor and temperature-controlled sealed and temperature-controlled
SEM configurations.
total chamber – protecting the
sealed platform, and Mag-NetX in aacousticalenvironmental solution to
acoustical chamber – protecting the SEM fromsensitive SEMs from all
protect and acoustic noise.
SEM from vibration, magnetic field disturbances,vibration, magnetic field
disturbances, and acoustic noise.
outside interference.
Integration of the three systems ensures proper fit and compatibility.
Integration isolation system can be inside the enclosure itself. Also,
SEM-Closure is compatibility.
The vibrationof the three systems ensures proper fit anddesigned to The vibration isolation system can be inside
the enclosure itself. Also, the SEM-Closure frame is designed to accommodateSEM-Closure front view with 12" module well as
Mag-NetX Helmholtz coils as on left side,
accommodate SEM-Base, an active the SEM-Closure frame cancellationto
piezoelectric vibration is designed
24" module on right side. Modularity accommodates various
the platform, and Mag-NetX in sealed and a second frame to house
flooracoustic panels, eliminatingathe need fortemperature-controlled the coils. SEM-Closure provides multiple
SEM configurations.
accommodate Mag-NetX Helmholtz
access points, a heat dissipation system, and vibration, magnetic field
acoustical chamber – protecting the SEM fromprovisions for tool plumbing and cabling within the system.
coils as well as the acoustic panels,
The modular architecture of the eliminating the need for second
disturbances, and acoustic noise. standard enclosure allowsaample space for
many different commercial SEMs in various configurations.
frame to house and compatibility.
Integration of the three systems ensures proper fit the coils. SEM- The vibration isolation system can be inside
Closure provides multiple to accommodate Mag-NetX Helmholtz coils as well as
the enclosure itself. Also, the SEM-Closure frame is designed access
Acoustic Transmissibility system,
the acoustic panels, eliminating thepoints, a heat dissipation to house the coils. SEM-Closure provides multiple
need for a second frame
0
and provisions for tool plumbing and
access points, a heat dissipation system, and provisions for tool plumbing and cabling within the system.
-10
cabling within the system.
The modular architecture of the standard enclosure allows ample space for
-20
many different commercial SEMs in various configurations.
dB
SEM-Closure
SEM-Closure
-30
Optional quarter-panel door for quick
and easy access
Acoustic Transmissibility
-40
0
-50
SEM-Closure™ Ordering Chart
dB
-10
-60
Catalog No.
30-101-00-00
-20
-70
10
-30
100
1000
10000
Frequency, Hz
This measurement was taken during a non-optimized, factory floor installation without
proper mounting of the SEM-Closure to the floor. Even better performance will be achieved
-50 in lab floor and cleanroom floor installations.
-70
10
•
100
978-532-6330
•
30-101-00-00
1000
Frequency, Hz
10000
Fax: 978-531-8682
•
•
sales@techmfg.com
This measurement was taken during a non-optimized, factory floor installation without
proper mounting of the SEM-Closure to the floor. Even better performance will be achieved
in lab floor and cleanroom floor installations.
Width Depth Height
50
•
978-532-6330
•
800-542-9725 (Toll Free)
www.techmfg.com
•
•
978-532-6330
Fax: 978-531-8682
•
•
sales@techmfg.com
800-542-9725 (Toll Free)
•
Fax: 978-531-8682
62.5
92.5
NOTE:
Change suffix -00 to -12 for 12 in. side
module, or -24 for 24 in. side module.
First two-digit suffix is for the left side,
second two-digit is for the right side.
Model shown is number 30-101-12-24.
(continued on back side)
www.techmfg.com
92.5
second two-digit is for the right side.
Catalog No.
800-542-9725 (Toll Free)
62.5
SEM-Closure™isOrdering Chart
Model shown number 30-101-12-24.
(continued on back side)
www.techmfg.com
50
NOTE:
Change suffix -00 to -12 for 12 in. side
Optionalor -24 for 24 in. side module.
module, quarter-panel door for quick
and easy access is for the left side,
First two-digit suffix
-40
-60
Width Depth Height
•
sales@techmfg.com
"
