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Stage-Base? 450 with STACIS® inside0 pages
Moving stage
and granite shown
for reference
VIBRATION CONTROL
Stage-Base 450
™
with STACIS® inside
STACIS® inside
Active Vibration and Motion
Cancellation
solation Systemsfor Increased
Throughput
Hard-mount active
isolators
Optional voice coil motors
(VCM) inside for motion control and
TMC continues to apply advancing tech- Nos. 5,660,255,
U.S. Patent
faster settling time (Patent Pending)
Fast settling time
5,823,307, Other Patents Pending
nology to develop new solutions to the
in response to stage motion
challenging demands that semiconductor
tools place on their vibration isolation
systems. Stage-Base™ 450 is the next genFeatures
eration in active hard-mount piezoelectric
• Incorporates patented STACIS® technology
Marked
vibration cancellation integrating voice coil
• Active inertial vibration cancellation system
™
technology. Only TMC can offer•this unique
Vibration cancellation starts below 1 Hz
serial-type technology for advanced low stroke piezoelectric actuators,
• Extended
up to voice
r
frequency vibration cancellation with 60 microns
• 6 active degrees-of-freedom
lation System
coil motors (VCM) for aggressive mov• Consists of two isolation systems in series
ing-stage motion cancellation. for maximum vibration cancellation
ts ≈ 800ms*
ts ≈ 200ms*
e-Base
ors
Stage
Profile
Payload
Acceleration
Features
active control system incorporates TMC’s
STACIS® technology to achieve extreme
vibration cancellation using piezo-electric actuators and a stiff suspension in a
serial-type architecture. This results in
floor vibration isolation starting at 0.6Hz
unmatched in the industry with significantly
cies and unprecedented levels of high frequency
The STACIS® iX LaserTable-Base combines
New DC 2020 high speed digital controller
less initial deflection in response to stage
these two technologies, air and STACIS®, into isolation due to the combined effect of two
with PC-Based GUI via USB
forces. With the addition of VCM with
one integrated cancellation system. The result isolation systems in series.
is vibration cancellation at very low frequen(continued on back side)
feed-forward control for
Transmissibility *
1000%
10
even faster settling time to
Transmissibility*
1000%
10
further increase throughVertical
Horizontal
put, the result is the most
0
1
advanced Active Vibration
and Motion Cancellation
system for moving stage
90%
0.1
90%
0.1
applications.
• Employs high-force,
extended stroke piezoelectric
actuators
•
Position repeatability of
payload to within microns
• Frame-mountable design
• active degrees-of-freedom
6
• Optional feedforward
and/or feedback with VCM
•
Active vibration isolation
starting at 0.6Hz
•
Fast settling time in
response to stage motion
• soft air suspension
No
•
High speed digital controller
with PC-Based Graphical
User Interface (GUI)
via USB 2.0
•
Simple, robust, and
cost-effective
Isolation Amplification
Isolation
)
Amplification
efficient vibration cancellation, just as
critical, they require that payload motion
(
el
“With” VCM
* ime to settle payload acceleration from 0.8m/s2 to 0.01m/s2 in response
T
• Incorporates patented MaxDamp® stage with 300N Force
to moving
Stage-Base 450 is specifically designed to be
Air Isolators
• Simple, robust,
the primary vibration cancellation system and cost-effective
induced by the stage settle very quickly to
• Installs easily,
for advanced semiconductor tools which minimal tuning required
• Incorporates unique
• Optional shelves maximize tool throughput. Building on the
incorporate high-precision motorized X-Y for mounting equipment
under the table
STACIS® iX Stage-Base, this next generation
STACIS® technology
stages. While such tools require•extremely DC-2000 Digital Controller
Includes TMC’s
Transmissibility = Acceleration Transmitted
Acceleration Input
t
“Without”
VCM
Frame
Mountable
99%
0.01
99%
0.01
0.001
.5
1
5
10
50
99.9%
Frequency, Hz
1
10 ™
* 4,000 lb (1,800 kg) capacity LaserTable-Base with MaxDamp® Isolation System.
Frequency, floor
Payload of 2,000 lbs (907 kg), tested with simulatedHz vibration at VC-C
(500 micro-inches per second, 12.5 microns per second).
100
with1540 lb. (700 Kg)
* Testedwith simulated floor
payload
vibration at VC-C (500 micro-inches
per second, 12.5 microns per second).
78-532-6330 • 800-542-9725 (Toll Free) • Fax: 978-531-8682 • sales@techmfg.com • www.techmfg.com
Stage-Base™ 450, January 2015
www.techmfg.com
•
978-532-6330
•
800-542-9725 (Toll Free)
•
Fax: 978-531-8682
•
sales@techmfg.com
"
