EL-FLOW® Select Thermal Mass Flow Meters and Controllers for Gases0 pages

EL-FLOW

®

Digital Thermal Mass Flow Meters and Controllers for Gases

> Introduction
Bronkhorst High-Tech B.V., the European market leader in thermal
Mass Flow Meters/Controllers and Electronic Pressure Controllers,
has many years experience in designing and manufacturing precise
and reliable measurement and control devices. With a
wide range of instruments, Bronkhorst High-Tech offers innovative
solutions for many different applications in many different markets.
The instruments are made to customers’ specification, in various
styles, suitable for use in laboratory, industrial and hazardous
areas, in such diverse applications as semiconductor and analytical
installations, to name but two.

> E L-FLOW® series for Laboratory and
Instrumentation
EL-FLOW® series Mass Flow Meters and Controllers for gas
applications have a housing designed for laboratory and clean
processing conditions. The instruments are truly unique in their capability
to measure and control flow ranges between 0,014…0,7 mln/min and
8…1670 ln/min with pressure rating between vacuum and 400 bar
– all in one range of instruments. This versatility in flow ranges and
in operating conditions has ensured that the EL-FLOW® series
remains our most popular and field proven of instruments.

> State of the art digital design
Todays EL-FLOW® series are equipped with a digital pc-board,
offering high accuracy, excellent temperature stability and fast
response (settling times t98 down to 500 msec). The main digital
pc-board contains all of the general functions needed for
measurement and control. The latest EL-FLOW® design features
Multi Gas / Multi Range functionality, providing (OEM-) customers
with optimal flexibility and process efficiency. For more information
see our ‘MASS-FLOW Select’ leaflet.
In addition to the standard RS232 output the instruments also
offer analog I/O. Furthermore, an integrated interface board provides
DeviceNetTM, PROFIBUS DP, Modbus, EtherCAT® or FLOW-BUS
protocols. The latter is a fieldbus based RS485, specifically designed
by Bronkhorst High-Tech for their mass flow metering and control
solutions, and with which the company has many years of
experience with digital communication.

> Mass Flow Controllers for every application
The control valve can be furnished as integral part of an EL-FLOW®
MFC, or as separate component. It is a proportional, electromagnetic control valve with extremely fast and smooth control
characteristics. With reference to the specific field of application
there are different series of control valves. There is a standard
direct acting valve for common applications, a pilot operated valve
for high flow rates, the so-called Vary-P valve that can cope with
6 up to 400 bar ΔP and a bellows valve for applications with very
low differential pressure.

> General EL-FLOW® features
utfast response, excellent repeatability
uthigh accuracy
utvirtually pressure and temperature independent
utpressure ratings up to 400 bar
utoptional metal sealed and downported constructions

> Digital features
utDeviceNetTM, PROFIBUS DP, Modbus-RTU/ASCII, EtherCAT® or
FLOW-BUS slave; RS232 interface

ut ptional Multi Gas / Multi Range functionality up to 10 bar
o
ut torage of max. 8 calibration curves
s
ut larm and counter functions
a
ut ontrol characteristics user-configurable
c