High purity gas systems0 pages

Intro 5
Model No. Type/Classification
Working fluid
Connection
Cv flow factor
Page
Model No. Working fluid
Supply fluid pressure
(MPa)
Ultimate vacuum
(kPa(abs))
Connection Page
Model No. Working fluid
Maximum working pressure
(MPa)
Set pressure range
(MPa)
Connection Page
Process gas valve
0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1.0
Regulator Other process gas valves Manual valve Air operated valve
· Air operated valve
· Metal diaphragm
structure
· 22.5 compact
type
AGD01
2V
· Air operated valve
· Metal diaphragm
structure
· Standard size
AGD11
2V/AGD21
2V
*Contact CKD for details on other joints such as 1/8-inch JXR.
Parts compatible with other variations
· Manual valve
· Metal diaphragm
structure
· Handle open/close
(90° snap action)
OGD1
20V
· Manual valve
· Metal diaphragm
structure
· Handle open/close
(270° rotation)
MGD1
20V
Parts compatible with other variations
· Vacuum generator for
process gas exhaust
· Diaphragm type extremely small flow rate adjustment valve
· Piston structure check valve
VG
PGM
Pneumatic operated
2-port valve
Normally closed
Normally open
Inert gas
Process gas
1/4" JXR male joint
1/4" JXR female joint
Refer to the indicated
page for details.
Refer to the indicated
page for details.
1/4" JXR male joint
1/4" JXR female joint
1/4" double barbed joint
3/8" JXR male joint
3/8" JXR female joint
3/8" double barbed joint
Manual 2 port valve
Inert gas
Process gas
Inert gas
Process gas
0.4 to 0.6
-0.07 to 0.21MPa (pressure range 30V)
0 to 0.21MPa (pressure range 30)
0 to 0.35MPa (pressure range 50)
0 to 0.42MPa (pressure range 60)
0 to 0.7MPa (pressure range 100)
1/4" JXR male joint
1/4" JXR female joint
1/4" double barbed joint
3/8" JXR male joint
3/8" JXR female joint
3/8" double barbed joint
IN1/4" JXR male joint
VAC.1/4" JXR female joint
VENT3/8" JXR male joint
Inert gas
Process gas
1.0
13.3 or less
1/4" JXR male joint
1/4" JXR female joint
1/4" JXR male
female joint
1/4" JXR female
male joint
Various integrated
valve interfaces
1/4" JXR male joint
1/4" JXR female joint
1/4" double barbed joint
3/8" JXR male joint
3/8" JXR female joint
3/8" double barbed joint
0.1
0.26
0.6
0.26
0.6
0.26
0.6
0.1
0.26
0.6
0.26
0.6
P.6
P.8
P.10
P.24
P.26
P.28
P.34
P.36
P.42
*The pressure range in parentheses is psi.
*
High purity gas control systems
Selection guide <>
*Refer to Intro 7 to 8 in the introduction for the high vacuum component selection guide.