Component for chemicals0 pages

Intro 5
Series variation
Sister product
Valve types
Air operated valve
2 port 2 port 2 port
Manual valve Toggle valve
Appearance, reference page
AMD3*2
AMD2/3/4/5*··· Page 58 MMD··· Page 98 TMD··· Page 102
AMB··· Page 66
AMDZ/0 AMD4*2 AMD5*2
··· Page 2
Option
Application Chemical supply system
Cleaning system
Application: Chemical supply system
Cleaning system
Application: Chemical supply system
Cleaning system
Application: Chemical supply system
Cleaning system
Chemical supply system
Cleaning system
Chemical supply system
Cleaning system
Coater/developer
Body material
Orifice diameter or suction rate
Stainless steel body
Ø8/Ø10
PFA/PTFE body
Ø6.3 to Ø10
Stainless steel body
Ø16
PFA/PTFE body
Ø14.7 to Ø16
Stainless steel body
Ø20
PFA/PTFE body
Ø1.6 to Ø4
PFA/PTFE body
Ø20
Super type Pillar fitting
Super 300 type Pillar fitting
F-LOCK 20 series fitting
F-LOCK 20A series fitting
F-LOCK 60 series fitting
Final lock fitting
FLARTEC fitting
PVC union joint
Rc thread
SUS weld tube
Double barbed joint
With flow rate
adjustment
With indicator
With bypass
For ammonia
For nitric acid/
hydrofluoric acid
For high
temperatures
(5 to 160 °C)
With flow rate
adjustment
With indicator
With flow rate
adjustment
With indicator
With bypass
For liquid ammonia
For liquid nitric
acid/hydrofluoric acid
For high
temperatures
(5 to 160 °C)
With flow rate
adjustment
With indicator
With flow rate
adjustment
With indicator
With bypass
For ammonia
For nitric acid/
hydrofluoric acid
With flow rate
adjustment
With indicator
With flow rate
adjustment
AMD0*2
··· Page 6
Chemical supply system
Cleaning system
PFA/PTFE body
Ø3 to Ø4
With flow rate
adjustment
With indicator
For ammonia
For nitric acid
Connection (fitting type)
Air operated valve
2 port
Peripheral devices
Regulator
PYM ··· Page 122 PMM10 ··· Page 124
PMM20 ··· Page 126
Connection: Rc1/8/Rc1/4
(Ø8, Ø10 for PMM20.)
Setting pressure range: 0.02MPa to 0.2MPa
Application: Coater/developer
Stainless steel body type
··· Page 16
Stainless steel body type
··· Page 24
Stainless steel body type
··· Page 32
PFA body type
··· Page 10
PFA body type
··· Page 20
PFA body type
··· Page 28
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