LITHOGUARD ® Series Chemical Contamination Filtration Cabinets0 pages

LITHOGUARD® Series Chemical
Contamination Filtration Cabinets

The Science of Air Filtration
for Critical Process Environments

Donaldson LITHOGUARD filtration cabinets offer the broadest
range of protection for your lithography tools and processes.
Building upon the success of earlier designs, the LITHOGUARD
v2.0 provides a more compact unit than either the LITHOGUARD
v1.0 or CFS cabinet. Donaldson’s patented parallel airflow
distribution, designed using Fluent® analysis and advanced
computer technology, ensures optimum contaminant removal
efficiency.
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Standard sized filters common to other LITHOGUARD cabinets
Different types of filtration media available
Configurable to meet your air flow requirements
Integrated air-inlet supply fans available
Stainless steel construction
Transition options
Global sales and service

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