Donaldson LITHOGUARD ® -12 Chemical Contamination Control0 pages

Donaldson LITHOGUARD®-12
Chemical Contamination Control

The Science of Air Filtration
for Critical Process Environments

The LITHOGUARD-12 cabinet and its associated chemical removal
filter inserts is a high efficiency filtration system that removes
gas-phase contaminants such as volatile bases, acid gases,
condensable organics, as well as particles. Designed for high end
lithography tools, including 248nm, 193nm “dry” and 193nm
immersion exposure tools, it provides an ultra-clean environment
that enables critical chemical processes and prevents the
degradation and contamination of optical elements.
The LITHOGUARD-12 is a small footprint cabinet, featuring:
• High efficiency filtration (each individual filter achieving 99+%
removal efficiency)
• Serial filtration that enables air sampling between the filters
• Low cost of ownership due to:
t
- long filter life
t
- refillable filter option
• Particulate filtration - HEPA efficiency
• No facility requirements. No connection to CDA or compressed t
N2 required.

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