LF-F series0 pages

LF-F Series
Liquid Flow Meter Specification
Model
Flow Range
(g/min)
Measurement
Range
Application
Liquid*1
Viscosity*2
Accuracy*3
Linearity
Repeatability
Response
Operating
Temperature*5
Temperature
coefficiency
Operating
Pressure*6
Pressure
Resistance
Pressure Drop*7
Flow Rate Signal
Power Supply
Leak Integrity
Wetted Material
Standard Fitting

LF-F20M-A

LF-F30M-A

LF-F40M-A

LF-F50M-A

LF-F60M-A

0.02/0.05/0.1

0.2/0.5

1/2/5

10/20

50/100

5 to 100% F.S.
All liquids except those corrosive to stainless steel (ex, HCl and HF)

Less than 3sec (T98)

max. 0.1 Pa·s (100cp)
±1% F.S.
±0.5% F.S.
±0.5% F.S.
Less than 2sec (T98)
5 to 50°C

± 0.1%F.S./°C max± 1%
Max. 5MPa (as flow meter) / 50 to 300kPa (with piezo control valve)
10MPa (as flow meter)
max. 500Pa
Analog: 0 to 5 VDC Digital: RS485
+15 V ± 5%, 200 mA -15 V ± 5%, 200 mA
-12
3
5 x 10 Pa·m /s (He)
SUS316L, Ni
1/8" compression 1/4" compression
1/16" , 1/8" compression fitting, 1/8" VCR type
fitting 1/8" VCR
fitting 1/4" VCR
type
type

*1 With the LF-F/LV-F Series, flow rate calibration is performed using one specified type of liquid. (Please indicate
the type of liquid to be used when ordering the device.)
- Liquids containing solid materials cannot be measured. - Please consult us in advance if you plan to use these
devices with liquid mixture for which the mixture ratio may vary.
- With the LV-F Series, if the liquid to be measured contains particle etc., please install a 0.2 µm (Abs) filter on the
primary side.
*2 The LV-F Type can be used with a maximum viscosity of 0.01Pa·s depending on the flow rate range. Please
consult us in advance if you plan to use this device with high-viscosity liquids.
*3 Specification of accuracy, linearity and repeatability is guaranteed against calibrated liquid based on SEMI E561296.
*4 It is the specification which is adjusted by Auto-PID function with our piezo control valve.
*5 In order to ensure precise measurement, please maintain incoming liquid temperature to be within 10 deg.C
lower or 3 deg.C higher than the ambient temperature.
*6 Specification of Operating Pressure is the pressure range when liquid viscosity is 0.001Pa·s.
*7 Specification of pressure drop is when liquid (with viscosity of 0.001Pa·s) is introduced at 100% F.S. of
measurement point.

LF-F Series Web Ver.001
Subject to change wit