series nanoSXY 1200 pages
nanoSXY 120
Ultra fast XY piezo positioning stage
Positionierer
Concept:
The nanoSXY 120 offers a long travel scanning
range, combined with a central aperture of 12.5 mm
in a compact design. Dynamic performance with a
high load capacity, supreme stiffness and a high
resonant frequency are major advantages of the
nanoSXY 120. The nanoSXY 120 is also available
Image: nanoSXY 120, vacuum version
with a capacitive measurement system.
The FEA designed actuating system based on flexure
hinges guarantees excellent guidance accuracy
without parasitic motion.
The durability of the nanoSXY 120 makes this series
Product highlights:
loop
of stages an excellent choice for permanent use in
industrial applications.
Specials:
The bi-directional gear design makes the system
very robust and makes it non-sensitive against external forces.
Vacuum and cryogenic versions are available on
travel range 120/100 µm open/closed
sub-nm resolution
excellent guidance accuracy
high Z-axis stiffness
12.5 mm central aperture
compact design
Application examples:
Mounting:
nano positioning
scanning
microscopy
metrology
super invar, aluminum or titanium.
demand as well as body material variations of invar,
alignment
The nanoSXY 120 can easily be fixed via four rectangular arranged through holes into any application or mechanical setup.
Options:
info@piezojena.com • http://www.piezosystem.com
nanoSXY_120_ds_Rev01_2015_01_16_MKr.docx
cryogenic version
phone: +49 (3641) 66880 • fax: +49 (3641) 668866
vacuum version
special material