5 axis piezo positioner PENTOR0 pages
PENTOR – 5-axis system
The PENTOR a piezo-electric stage was developed to meet the requirements of linear
movement in three axes while at the same time
being able to provide tip and tilt motion.
With 5 different degrees of freedom, 100 µm in
XYZ axes, and ±2 mrad in ʘX and ʘY axes, the
PENTOR provides a spatial positioning flexibility
to fulfill complex tasks.
PENTOR 100 SG
The PENTOR is equipped with a 17mm diameter open aperture that makes it ideal for optical
setups.
Due to the high stiffness, this element is able to
offer a high resonant frequency. Therefore the
PENTOR is very suitable for dynamic applications.
Product highlights:
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combination of a three axis translation
system and a two axis tilting system
•
free center hole with 17 mm diameter
and closed loop versions. The closed loop ver-
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integrated preload
sion is equipped with strain gage sensors to
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translation each axis: 100 µm
overcome drift and hysteresis.
•
tilt each direction: ±2 mrad
•
solid state flexure hinges in parallelo-
The 5-axes piezo stage is available in both open
gram design without mechanical play
Vacuum and low temperature versions are also
available upon request.
•
•
optional measurement system
vacuum and low temperature versions
available
Application examples:
•
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dynamical applications
•
laser tuning
•
Pentor_rev3_ds_2014_12_01.doc
micro and nano positioning
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info@piezojena.com • http://www.piezosystem.com
scanning system
life science
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