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Gaskleen® SP Gas Purifier0 pages
Gas Filtration Purifiers
nnnnData Sheet A102b
nnnnMicroelectronics
nnnnGaskleen® SP Gas Purifier
nnnnDescription Product Benefits
nnnnThe Pall Gaskleen® SP purifier assembly • Extends the time between sensor
nnnnprotects zirconium oxide (Zr02) sensors calibrations, which maximizes tool
nnnnused In oxygen analyzers. The purifier uptime and ensures accuracy of the
nnnnremoves harmful contaminants, which Instrument's readings.
nnnncause drifts in the oxygen analyzer • In-line configuration allows for easy
nnnnreadings and degradation of the electrode installation upstream of the oxygen
nnnnperformance. Use of this purifier does not analyzer.
nnnnaffect oxygen levels In the process stream. • The integral filter provides particle
nnnnremoval down to 3 nm.
nnnn• State-of-the-art 316L stainless steel • Flow rates up to 1 slpm.
nnnnfilter media with proprietary metal
nnnncatalyst
nnnn• Compact size
nnnn• 100% helium leak tested
nnnn• Cleanroom manufactured and packaged
nnnn• Ideally suited for use in RTP, LPCVD
nnnnand PECVD exhaust gas applications
nnnn(PALL)
nnnnSpecifications
nnnnMaterials
nnnn• Electropolished 316L SS housing
nnnn• 316L stainless steel filter medium with
nnnnproprietary metal catalyst
nnnn• < 10 uin / 0.25 urn Ra internal surface
nnnnfinish
nnnnRemoval Rating
nnnn• > 3 nm
nnnnParticle Removal Characteristics
nnnn• 109 reduction up to 1 slpm
nnnnConnections
nnnn• VA in Male gasket seal
nnnnOperating Conditions
nnnn• Maximum operating pressure:
nnnn1.48 MPa @ 400°C / 200 psig @ 752T
nnnn• Maximum differential pressure:
nnnn0.69 MPa @ 38°C / 125 psid @ 100T
nnnnLeak Testing
nnnn• 100% helium leak tested to 10-9
nnnnatm-cm3/s
nnnn• Design validated to 10~11 atm-cm3/s
nnnnEU Pressure Equipment Directive:
nnnnAssembly is designed and manufactured
nnnnin accordance with sound engineering
nnnnpractices per the European Union's
nnnnPressure Equipment Directive 97/23/EC.
nnnnFiltration. Separation. Solution.!*
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