LAB-10 MBE System0 pages

MBE PRO 753-V01/Oct10
MBE Systems / LAB-10 MBE System
LAB-10 MBE System: Standard System
with Preparation/Storage Chamber
and with Loadlock Chamber
LAB-10 chamber cross-section
Example for a realized system
LAB-10 Design
Main Features:
•t Accepts all types of Omicron standard small samples
•t Proofen chamber design for up to 7 effusion cells
•t Effusion cell capacity from 10 cm3 up to 35 cm3
•t Rotary shutters for the effusion cells
• Source to substrate distance: 160 mm
• Source angle tilt wrt. sample normal: 18°
t => < 1% thickness homogeneity for a 10 mm substrate
• In-Vacuum length for effusion cells: t
287 mm for CF70
t 270 mm for CF114
•t Large pumping port for high pumping speed and
t true UHV using Turbo-, TSP- and IGP-Pump
www.omicron.de
•t System design allows different growth applications:
t - Metal MBE Growth
t - Semiconductor Growth
t - Magnetic Materials Growth
t - Oxide MBE Growth
t - Organic MBE
•t Reliable sample manipulator with different options
t (cooling, heating, e-beam heating, ultra high
t temperature)
•t Main shutter for the sample manipulator
•t Easy and intuitive to operate the growth control
t software
•t Reliable and fast sample transfer
•t Excellent performance at low cost of ownership