Nexiv VMZ-K6555 brochure0 pages

CNC Video Measuring System VMZ-K6555
L Specifications
Types
3x
7.5x
15x
30x
Confocal Imaging & Metrology
Objectivesttt
Magnificationt
3xt
W.D.
7.5x
24mm
15x
30x
20mm
5mm
5mm
Confocal optics (Area height measurement)ttt
Maximum scan heightttt
Field of view
1mmt
3.90 x 2.91mm
1.56 x 1.16mm
0.78 x 0.58mm
0.39 x 0.29mm
Height measurement repeatability (2σ)
0.35μm
0.25μm
0.25μm
0.20μm
Pixel size in CF imaget
2.5μm
1μm
0.5μm
0.25μm
Measurement time par FOVtt
1.5 sec./FOV at 80μm scan range with 3x objective lenstt
Lens Mold
Brightfield optics (2D measurement)ttt
Zooming methodtt
5-step 15x zoom ratio
Field of view
3.90 x 2.92mm to
0.26 x 0.19mm
Illumination
5-step 12.8x zoom ratio
1.56 x 1.17mm to
0.10 x 0.078mm
1.26 x 0.95mm to
0.095 x 0.074mm
0.63 x 0.47mm to
0.05 x 0.037mm
White LED diascopic and episcopic illuminator for all types, White LED ring light for type 3x and 7.5x
Auto focusttt
Vision AF and TTL laser AF (Scan Mode available)tt
Main bodyttt
Stroke (X, Y, Z) ttt
650 x 550 x 150mmtt
Guaranteed loading capacitytt
Maximum permissible error
30kgtt
MPEE1X, MPEE1Ytt
MPEE2XYt
Maximum permissible error
of Z axistt
MPEE1Z
1.5 + 2.5L / 1000 μmtt
2.5 + 2.5L / 1000μmtt
CNC Video Measuring System
1 + L / 1000μm
2D measurement repeatability (at 5x or higher)
CONFOCAL NEXIV
0.75μm (2σ)tt
Power source/power consumptiontt
AC 100 to 240 V ± 10% 50/60 Hz / 13A to 6.5Att
Operating conditionttt
Temperature: 20 °C ± 0.5K, Humidity: 70% or less
Footprint & main unit weight
2500 x 1900mm, main unit 850kg, miscellaneous 100kg
Acquired standardttt
VMZ-K6555
CE marking (low voltage/EMC/laser)tt
Please contact Nikon for permissible floor vibration specifications.
n Dimensional diagram
Bonding Wire
1220
900
280
776
701
247.5
550 (Y Stroke)
247.5
300
27.5
96.5
850
456
1050
1600
73.5
760
165
1970
490
18xM6 Depth 10
100 x 6
650 (X Stroke)
950
1150
Fine Bump
Unit: mm
The products detailed in the brochure are controlled by the Japanese Foreign Exchange and Foreign Trade Law and the International Export Control Regime. If there is a
possibility that they may be utilized for the development of weapons of mass destruction, etc., they shall not be exported without authorization from the government.
Specifications and equipment are subject to change without any notice or obligation on the part of the manufacturer. December 2009
©2009 NIKON CORPORATION
WARNING
TO ENSURE CORRECT USAGE, READ THE CORRESPONDING MANUALS CAREFULLY BEFORE USING YOUR EQUIPMENT.
* Monitor images are simulated.
t Company names and product names appearing in this brochure are their registered trademarks or trademarks.
NIKON CORPORATION
NIKON CORPORATION 3-chome, Chiyoda-ku,
Fuji Bldg., 2-3, Marunouchi
6-3, Nishiohi 1-chome, Shinagawa-ku, Tokyo 140-8601, Japan
Tokyo 100-8331, Japan
phone: +81-3-3773-9026 fax: +81-3-3773-9062
www.nikon.com/
http://www.nikon.com/products/instruments/
NIKON INSTRUMENTS INC.
1300 Walt Whitman Road, Melville, N.Y. 11747-3064, U.S.A.
phone: +1-631-547-8500; +1-800-52-NIKON (within the U.S.A. only)
fax: +1-631-547-0306
http://www.nikoninstruments.com/
NIKON INSTRUMENTS EUROPE B.V.
Laan van Kronenburg 2, 1183 AS Amstelveen, The Netherlands
phone: +31-20-44-96-222 fax: +31-20-44-96-298
http://www.nikoninstruments.eu/
NIKON INSTRUMENTS (SHANGHAI) CO., LTD.
CHINA phone: +86-21-5836-0050 fax: +86-21-5836-0030
(Beijing branch) phone: +86-10-5869-2255 fax: +86-10-5869-2277
(Guangzhou branch) phone: +86-20-3882-0550 fax: +86-20-3882-0580
Printed in Japan (0912-05)T/NC
NIKON SINGAPORE PTE LTD
SINGAPORE phone: +65-6559-3618 fax: +65-6559-3668
NIKON UK LTD.
UNITED KINGDOM phone: +44-208-247-1717 fax: +44-208-541-4584
NIKON MALAYSIA SDN. BHD.
MALAYSIA phone: +60-3-7809-3609 fax: +60-3-7809-3633
NIKON GMBH AUSTRIA
AUSTRIA phone: +43-1-972-6111-00 fax: +43-1-972-6111-40
NIKON INSTRUMENTS KOREA CO., LTD.
KOREA phone: +82-2-2186-8400 fax: +82-2-555-4415
NIKON BELUX
BELGIUM phone: +32-2-705-56-65 fax: +32-2-726-66-45
NIKON CANADA INC.
CANADA phone: +1-905-602-9676 fax: +1-905-602-9953
NIKON FRANCE S.A.S.
FRANCE phone: +33-1-4516-45-16 fax: +33-1-4516-45-55
NIKON GMBH
GERMANY phone: +49-211-941-42-20 fax: +49-211-941-43-22
NIKON INSTRUMENTS S.p.A.
ITALY phone: +39-055-300-96-01 fax: +39-055-30-09-93
NIKON AG
SWITZERLAND phone: +41-43-277-28-60 fax: +41-43-277-28-61
Code No. 2CE-IEMH-1
En
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