Confocal Nexiv VMZ-K3040 brochure0 pages

■ Specifications
Types
Type - S
Objectivesttt
Magnificationt
Confocal Imaging & Metrology
Type - H
3xt
7.5x
15x
30x
24mm
W.D.
5mm
20mm
5mm
Confocal optics (Area height measurement)ttt
Maximum scan heightttt
Field of view
1mmt
3.90 x 2.91mm
0.35μm
Height measurement repeatability (2σ)
1.56 x 1.16mm
0.25μm
0.25μm
0.20μm
1μm
0.5μm
0.25μm
Pixel size in CF imaget
2.5μm
Measurement time par FOVt
0.78 x 0.58mm
0.39 x 0.29mm
1.5 sec./FOV at 80μm scan range with 3x objective lenstt
Brightfield optics (2D measurement)ttt
Zooming methodtt
5-step 15x zoom ratio
5-step 12.8x zoom ratio
Field of view
3.90 x 2.92mm to
0.26 x 0.19mm
1.56 x 1.17mm to
0.10 x 0.078mm
Illumination
White LED diascopic and episcopic illuminator for all types, White LED ring light for type 3x and 7.5x
Auto focusttt
1.26 x 0.95mm to
0.095 x 0.074mm
0.63 x 0.47mm to
0.05 x 0.037mm
Vision AF and TTL laser AF (Scan Mode available)tt
Main bodyttt
Stroke (X, Y, Z) ttt
300 x 400 x 150mmtt
Accuracy Guaranteed loading capacitytt
Maximum permissible error
20kgtt
MPEE1X, MPEE1Ytt
MPEE2XYt
Maximum permissible error
of Z axistt
MPEE1Z
1.5 + 4L / 1000 μmtt
2.5 + 4L / 1000μmtt
CNC Video Measuring System
1 + L /1000μm
2D measurement repeatability (at 5x or higher)
CONFOCAL
0.75μm (2σ)tt
Power source/power consumptiontt
AC 100 to 240 V ± 10% 50/60 Hz / 13A to 6.5Att
Operating conditionttt
Temperature: 20 °C ± 0.5K, Humidity: 70% or less
Footprint and main unit weight
■ Dimensional Diagram
VMZ-K3040
2500 x 1600mm, main unit 800kg, miscellaneous 100kg
Acquired standardttt
CE marking (low voltage/EMC/laser)tt
Please contact Nikon for permissible floor vibration specifications.
Unit: mm
Specifications and equipment are subject to change without any notice or obligation
on the part of the manufacturer. 　August 2011 ©2011 NIKON CORPORATION
WARNING
TO ENSURE CORRECT USAGE, READ THE CORRESPONDING
MANUALS CAREFULLY BEFORE USING YOUR EQUIPMENT.
* Monitor images are simulated.
t Company names and product names appearing in this brochure are their registered trademarks or trademarks.
NIKON CORPORATION
Shin-Yurakucho Bldg., 12-1, Yurakucho 1-chome, Chiyoda-ku, Tokyo 100-8331, Japan
phone:+81-3-3216-2384 fax:+81-3-3216-2388
http://www.nikon.com/instruments/
NIKON METROLOGY, INC.
NIKON SINGAPORE PTE LTD
NIKON METROLOGY UK LTD.
12701 Grand River Avenue, Brighton, MI 48116 U.S.A.
phone: +1-810-220-4360 fax: +1-810-220-4300
E-mail: sales_us@nikonmetrology.com
http://us.nikonmetrology.com/
http://www.nikoninstruments.com/
SINGAPORE phone: +65-6559-3618 fax: +65-6559-3668
UNITED KINGDOM phone: +44-1332-811-349 fax: +44-1332-639-881
E-mail: sales_uk@nikonmetrology.com
NIKON METROLOGY EUROPE NV
KOREA phone: +82-2-2186-8400 fax: +82-2-555-4415
Geldenaaksebaan 329, 3001 Leuven, Belgium
phone: +32-16-74-01-00 fax: +32-16-74-01-03
E-mail: sales_europe@nikonmetrology.com
http://www.nikonmetrology.com/
NIKON INDIA PRIVATE LIMITED
NIKON INSTRUMENTS (SHANGHAI) CO., LTD.
CANADA phone: +1-905-602-9676 fax: +1-905-602-9953
CHINA phone: +86-21-6841-2050 fax: +86-21-6841-2060
(Beijing branch) phone: +86-10-5831-2028 fax: +86-10-5831-2026
(Guangzhou branch) phone: +86-20-3882-0552 fax: +86-20-3882-0580
NIKON MALAYSIA SDN BHD
MALAYSIA phone: +60-3-7809-3688 fax: +60-3-7809-3633
NIKON METROLOGY SARL
NIKON INSTRUMENTS KOREA CO., LTD.
FRANCE phone: +33-1-60-86-09-76 fax: +33-1-60-86-57-35
E-mail: sales_france@nikonmetrology.com
INDIA phone: +91-124-4688500 fax: +91-124-4688527
NIKON CANADA INC.
NIKON METROLOGY GMBH
GERMANY phone: +49-6023-91733-0 fax: +49-6023-91733-229
E-mail: sales_germany@nikonmetrology.com
NIKON INSTRUMENTS S.p.A.
ITALY phone: +39-055-300-96-01 fax: +39-055-30-09-93
NIKON AG
SWITZERLAND phone: +41-43-277-28-67 fax: +41-43-277-28-61
NIKON GMBH AUSTRIA
AUSTRIA phone: +43-1-972-6111-00 fax: +43-1-972-6111-40
NIKON BELUX
En
BELGIUM phone: +32-2-705-56-65 fax: +32-2-726-66-45
Printed in Japan (1108-05)T
Code No.2CE-IFPH-1
This brochure is printed on recycled paper made from 40% used material.