Chemical Particle Counter: CLS-10000 pages

Corrosive Liquid Sampler

BENEFITS Defect Reduction >

Quick sample cycle allows for faster detection of anomalies >

ё

Large sample volume allows for tighter process control and less data variability >

0.1 ѵm sensitivity for ultra-pure processing Increase Productivity >

50 mL/minute flow rate and 100% view volume mean quicker process qualification >

ё

Longer wet bench maintenance intervals based on data collected in real-time Cost Effective >

User-selectable measured volume conserves expensive chemicals >

ё

Compression sampling allows instrument to measure most chemicals, including effervescent chemicals, up to 9 0 The CLS-1000 corrosive liquid sampler from Particle Measuring Systems is a compression sampler combined with a Liquistat >
C >
Ю volumetric particle counter for measuring liquid chemicals up to 90C. Built-in safety features like leak detection and purge air make it ideal for integration into a wet bench for use with dangerous solvents and acids. Designed for versatility and reliability, the system can be located on a cart for increased mobility when sampling from process to process.The compression sampler eliminates erratic data problems that are due to bubbles in effervescent or hot corrosive chemicals. The CLS-1000 corrosive liquid sampler is fully compliant with the new SEMI C1 standard for particle measurement of process chemicals. >

Б

Easily portable for use throughout factory Built-In Safety >

Internal leak detection and containment >

ё

Corrosive resistant polypropylene exterior >

Purge gas forces dangerous vapors out of enclosure to prevent internal corrosion >

ё

Visible status indicator APPLICATIONS >

Wet process monitoring >

ё

Bath qualification >

Chemical QA measurements >

ё

General product monitoring Without measurement, there is no control. >