MiniNet® Particle Monitor for Minienvironments 0 pages

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mERSunine

5475 Airport Boulevard, Boulder, Colorado 80301-2339 303.443.7100 1.800.238.1801 Fax: 303.546.7380 Customer Service Center 1.877.475.3317 Instrument Service 1.800.557.6363

Improving minienvironment process control ^^^^^^^^^^^^^^^^^h

requires monitors providing immediate and accurate data sets. These data sets should clearly illustrate the minienvironment's cleanliness and ability to perform processes without adding particles to wafers. This process control is especially important as minienvironments age and the doors, seals, and robotics tend to wear. Without minienvironment monitors, the process control can quickly degrade and adversely impact product yields.

 Minienvironments are small, sometimes densely populated, spaces. Any monitor should fit within small confines and not hinder the minienvironment's processes.

Օ Monitors should evaluate both differential air pressure and particle activity. Since the minienvironment sustains positive pressure with respect to the fab, decreases in differential pressure could signify enclosure deterioration and allow particle ingress.

 Wafers quickly pass through most minienvironments, so any monitor should provide immediate and accurate data.

Օ Monitors correlating both differential air pressure and particles will provide a clear, concise report of the minienvironment's process and efficiency.

 The MiniNet monitor simultaneously monitors both differential air pressure and particle activity.

Օ The MiniNet monitor includes seven sample lines attached to an ensemble manifold. This provides particle data from seven distinct locations within the minienvironment.

 Better coverage means better analysis.

Օ The MiniNet monitor communicates all data through an on-board 10Base-T (Ethernet), which provides remote data analysis and trending reports.

 Monitoring both differential air pressure and particles provides more valuable information than monitoring only differential air pressure.