GE
Measurement & Control Solutions
nanome|x – the high-end 2D and 3D X-ray solution
This automatic X-ray system of superior specifications satisfies even highest demands for the
inspection of high-end interconnections in the semiconductor and SMT industry. The high-performance nanofocus tube (4-in-1) covers the full range from submicron resolution to high-intensity applications. The digital realtime image chain provides an excellent contrast resolution and
enables oblique views up to 70 degrees and magnifications well above 24 000x. The nanome|x
offers unique performance and versatility and can be used for 2D X-ray inspection as well as for
full 3D computed tomography. With the new x|act software package the nanome|x is the system
of choice to ensure meeting actual and future zero defect requirements.
nanoCT® of CSP solder joints
QFN: two open joints
Wedge-bond
Setting new standards
t180 kV / 15 W high-power nanofocus tube
t2-Megapixel digital image chain
t24” TFT monitor
Cracked die
tx|act software package: easy and fast CAD based programming for highresolution automated X-ray inspection (µAXI) with high magnification and
repeatability as well as live CAD pad information overlay
tDetail detectability down to 0.2 microns (200 nanometer)
tOptical zoom up to 24,000x
tOblique views at angles between 0 and 70 degrees
tDual detector (digital image chain and active temperature-stabilized digital
Live data overlay of a defect BGA ball
DXR detector with 30 fps) for brilliant live images at 1,000 x 1,000 pixels
tOptional 4-Megapixel digital image chain
tOptionally upgradeable to nanoCT® for CT scans within just 10 seconds
tOptional diamond|window for up to 2 times faster CT data acquisition
nanoCT® of stacked dies