Dycor LC Series0 pages

DYCOR

PROCESS INSTRUMENTS

LC Series Residual Gas Analyzer

Offering the most cost-effective solution for your applicationspecific, process monitoring needs
Software Features
tVariety of operating modes
including Analog and Bar, Meter,
Annunciator, Tabular, Trend, and
Leak Detection
tCustom modes to combine
display windows from other
modes
tData that can be viewed in real
time or saved to a file for later
retrieval and comparison with
current spectra
tAuto-Tune capabilities to ensure
high quality, repeatable data
tLibrary Mode for comparison
between collected sample
spectra and stored library
spectra. Facilitated by splitscreen display
tDynamic Data Exchange (DDE)
automation for limited control by
Windows applications
tSingle or continuous scan with
user-defined interval

Description
The Dycor LC-Series Residual Gas
Analyzer (RGA) offers outstanding
performance, yet is priced to
be the most cost-effective RGA
on the market. The LC-Series
instruments are constructed from
materials that are compatible
with Ultra High Vacuum (UHV)
systems and are designed to
require the very minimum in
maintenance. This versatile RGA
is ideally suited for use with UHV
systems and equipment monitoring
of semiconductor and thin film
processes in the high vacuum
range. Coupled with the System
200 software (which is 32-bit, multithreaded, and designed for use
with Windows XP and Vista), the
LC provides advanced features that
are associated with higher priced
instruments. The LC-Series RGA is
clearly the best performing and most
affordable analyzer solution for your
application.

The LC-Series RGA includes
Dycor’s 1-100 AMU-range open
ion source analyzer head with dual
filaments and Faraday cup detector,
electrometer preamplifier, and RF
power supply with an RS-232 port
for interfacing to a PC. Options
include 1-200 AMU range and
channel plate electron multiplier.
tAlarms
t Every data channel has low, low
warning, high warning, and high
alarms.
tt alibration and Auto Tune
C
tAutomatically sets RF-tune,
mass position and resolution.
tPrinting
t Print one, some, or all data
displays.
tSupports color printers.
tAnalog Output
t One analog output and two TTL
output signals are provided.

tAlarms: Low, Low Warning, High
Warning, High

The LC provides advanced features
that are associated with higher priced
instruments.

Available with optional 20’ or 50’ cable for use in high radiation environments.
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