MultiTherm 10000 pages

W W W . M K S I N S T . C O M

Control Systems

MultiTherm 1000
TEMPERATURE CONTROLLER
Introducing the MultiTherm 1000 for multi-zone temperature control applications. MultiTherm
1000 is the first in the MultiTherm line and latest addition to the MKS control platform family.
The controller is offered with ModbusTCP and EtherCAT® connectivity for high-speed data
exchange with seamless integration into an EtherCAT system.
The MultiTherm 1000 features 16 precision sensor channels accepting RTDs and
thermocouples, and 16 output channels with built-in solid-state relays. The output for each
zone can be controlled independently using PID or modeled based control for precision and
very dynamic responses. Each output channel is supplemented with heater diagnostics to
detect heater failures or degradation to reduce possibility of costly process damage. Safety
interlocks at HW & SW levels allow integration of over-temperature and EMO switches
into the system. The heater power routing with internal fusing is a cost saving feature that
eliminates the need for external hardware.
The MultiTherm 1000 features front panel LED indicators for individual sensor channels,
outputs, Interlocks and alarms. The unit is offered in a compact, DIN rail mountable package
with quiet fanless operation. The MultiTherm 1000 provides an all-in-one solution for multizone temperature control while minimizing system cost, complexity and space.

Features & Benefits

Applications

•t 16 sensor input channels RTDs and t
tthermocouples
•t 16 heater output channels with built-in t
tSSRs
•t Optional PWM output for external SSRs
•t EtherCAT and Modbus TCP tt
tconnectivity
•t PID control with auto-tuning, MBCt
t(optional)
•t Sensor and heater diagnostics
•t Front panel LED’s for sensors, heaters t
t and diagnostics
•t Safety interlocks - HW and SW based
•t Quiet fanless operation
•t Metal casing with DIN rail mount ability

•t Semiconductors, Solar, and LED/MOCVD tt
t manufacturing tools
•t Furnaces and environmental chambers tt
t requiring multi-zone control
•t Plastic injection molding and extrusion tt
tsystems
•t Medical, Biomed, and Life Sciences
•t Packaging, Food and Beverage