M1000 pages

W W W . M K S I N S T . C O M

Flow Measurement
& Control

M100B/M10MB

ECONOMICAL, RANGE ADJUSTABLE tttt
MASS-FLO® CONTROLLER/METER
The economical M100B Mass Flow Controller and M10MB Mass Flow Meter are designed
tttttttt
to control and measure gas flows in a wide variety of analytical, experimental and industrial
applications. The instruments are available with Full Scale ranges of 10 sccm to 20 slm t
(N2 equivalent). The M100B can also be used as a pressure controller when connected to an
MKS pressure transducer.
The M100B and M10MB utilize industry standard 3-inch footprint and comes with a variety
of fittings enabling the instruments to drop into existing gas lines without modification. The
instruments are constructed of 316L stainless steel and offer a choice of elastomer seals for
use with a wide variety of gases.

Features & Benefits
Accurate
•tPatented1 bypass and electronics t
t provide excellent linearity over a wide t
t range of operating conditions
•t Typical 1% F.S. accuracy for flows from t
t 10 sccm to 5 slm
Robustt
•t Electronics design MTBF of over 100 t
t years and STRIFE tested to ensure long t
t term performance
•t Elastomer sealed, 316L stainless steel

1

U.S. Patent No. 5672821

Compatible
•t Standard three inch footprint with a t
t selection of fittings for ease of tt
tinstallation
•t Class 100 cleanroom manufactured and t
ttested
•t CE Mark compliant — meets tt
t requirements for European Union
•t Compatible with earlier MKS MFC’s and t
t power supply readout modules