Tru-Flo®0 pages

W W W . M K S I N S T . C O M

Flow Measurement
& Control

Tru-Flo®

MASS FLOW VERIFIER - RoHS COMPLIANT

The MKS Tru-Flo® Mass Flow Verifier (MFV) is a fully integrated diagnostic instrument that
provides in situ verification of mass flow controller (MFC) performance on semiconductor
process tools. The Tru-Flo MFV measures a pressure rate-of-rise into a known volume at a
known temperature to determine mass flow to within ±1% of Reading. It consists of a small
gas volume, an MKS Baratron® pressure sensor, shut off valves, and control electronics t
combined into a single compact package. The Tru-Flo can be easily incorporated into a t
process tool gas panel and communicates with a tool host computer via an RS-232 interface.
The Tru-Flo sets a new standard in gas delivery performance. Tool uptime is improved t
with rapid in situ MFC verification. Unnecessary removal of suspect MFCs is eliminated. t
Measurement accuracy is enhanced versus conventional techniques resulting in tighter t
process control. As a result, the Tru-Flo MFV provides almost immediate return on t
investment.

Features & Benefits
Higher System Uptime
•t In situ mass flow verification without t
t MFC removal
•t Shorter measurement time than any t
t other technique
•t Faster, more effective troubleshooting

Enhanced Process Controlt
•t Most accurate flow verification method
•t Widest flow verification range (up to t
t 5000 sccm)
•t No risk of contamination due to MFC t
tremoval