Gasket-Sertâ„¢ Filter0 pages

Data Sheet E32b

Gas Filtration Metal

Product shown larger than actual size

Gasket-Sert ™ Filter

Description

Specifications

The Gasket-Sert filter is designed to
protect major components of gas panels
employed in semiconductor gas distribution systems.

Materials

Operating Conditions

• Medium: 316L or Hastelloy C-22
• Gasket: Nickel 200

• Recommended Flow Range:
0-10 SCFM/0-280 slpm
• Maximum Operating Temperature:
Non-Corrosive Gases: 840°F / 450°C
Corrosive Gases: 70°F / 21°C
• Maximum Differential Pressure:
400 psid @ 840°F / 27 bar @ 450°C
750 psid @ 100°F / 52 bar @ 38°C

Removal Rating
• True in-line design and easy installation
• Fits in place of standard 1⁄4" VCR
Gasket
• Available in 316L or Hastelloy C-22
• Gasket material Nickel 200
• Broad compatibility with process gases
• Low differential pressure
• All metal construction
• Dried with high purity nitrogen
• Cleanroom packaged
• No particle contribution above
background
• No housing required
• Retrofit of existing panels without
reconfiguring of systems
• Zero displacement
•