EZ In-Line Filter Assembly0 pages

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A104

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PALL) Microelectronics

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In-Line Filter Assembly1

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Description

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The EZ In-line compact capsule assembly

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is ideally suited for filtering a broad range

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of liquids from photoresists, Including

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pigmented color resists, to various slurries

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such as CMP and ceramic. Other applica-

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tions include color Inks, photoemulsions,

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magnetic coatings, and conductive and

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glass pastes. It Is the largest capsule In

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the EZ series of assemblies offering quick,

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one-step filter replacements. Manifold

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connections are designed for easy

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removal of nozzles for cleaning.

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• Allows for quick and safe filter change-

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outs, and easy maintenance.

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• In-line flow design minimizes dead space

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• Capsule design prevents Incorrect

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orientation and Installation

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• Connection nozzles designed for simple

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change-out and easy maintenance

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• Ease of use sharply reduces down-time

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• Minimizes operator exposure to solvents

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• Profile Star depth filter media is

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especially suited for the removal of gels,

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aggregates and oversize particles

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• Available In nominal 130 mm (5 In.) and

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260 mm (10 In.) length cartridges

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suitable for most applications

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• Broad choice of connection sizes

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Specifications

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Materials

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Filter Capsule

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• Filter medium: Polypropylene

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• Core, cage, end caps, support,

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drainage and housing: Polypropylene

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• End seal/side seal: Heat sealed

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• O-ring options: EPDM, Perfluoro

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elastomer

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Head Manifold

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• Frame: FEP coated SUS 304

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• Connections (removal nozzles): PTFE

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Removal Ratings

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• 1.5 urn, 3.5 urn, 5 urn

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Connections

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• Inlet/Outlet:

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10 mm Swagelok2 compatible

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8 mm Swagelok compatible

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%" Swagelok compatible

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Swagelok compatible

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• Vent/Drain:

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8 mm Swagelok compatible

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6 mm Swagelok compatible

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Vf Swagelok compatible

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Product only available In Asia

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Swagelok is a trademark of Swagelok Co

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Operating Conditions

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• Maximum Operating Temperature:

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• Maximum Operating Pressure:

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0.19 MPa @ 30°C

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30°C

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Filtration. Separation. Solution.!*

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