Gaskleen® IV Series Filter Assembly0 pages

Data Sheet A22b

Gas Filtration Assemblies-PTFE

Gaskleen® IV
Series Filter Assembly

Description

Specifications

The Gaskleen® IV Series Filter Assembly
is specifically designed for ≥ 3 nanometers (0.003 µm) filtration of ultra-high
purity semiconductor process gases.

Materials

Connections

• Electropolished 316L stainless steel
housing material
• VAR PLUS housing meets or exceeds
typical VIM / VAR specifications
• ≤ 7 µin / 0.18 µm Ra internal surface
finish
• Cr:Fe (≥ 1.2:1) Chromium enriched
internal surface chemistry
• All fluoropolymer element
Medium: PTFE
Support: TFE / FEP
Core and end caps: PFA 440HP
O-ring: none

• 1⁄4" Gasket Seal, male (VCR or
compatible)
• 1⁄4" Butt Weld (0.035" / 0.89 mm wall)
• 3⁄8" Gasket Seal, male (VCR or
compatible)
• 3⁄8" Butt Weld (0.035" / 0.89 mm wall)
• 1⁄2" Butt Weld (0.049" / 1.24 mm wall)

This assembly provides additional
features over those normally associated
with all fluoropolymer element point-ofuse process gas filters. These include:
• No downstream (wetted surface) weld
• No elastomeric seals
• Rotatable VCR1 nuts for ease of
installation
• Excellent gas displacement
characteristics (low internal volume)

Additional characteristics
• High purity 316L stainless steel
electropolished housing
• All fluoropolymer element
• High temperature and pressure
capabilities
• Compact size (1.13 ˝ / 28.8 mm dia.)
for ease of installation
• 100% integrity tested
• Cleanroom manufactured and
packaged

Removal Rating2
• ≥ 0.003 µm

Operating Conditions
• Maximum Operating Pressure:
750 psig @ 284°F/52 bar @ 140°C
• Maximum Forward Differential
Pressure:
100 psid @ 100°F/7 bar @ 38°C
• Maximum Reverse Differential
Pressure:
50 psid @ 100°F/3.5 bar @ 38°C

Preconditioned Cleanliness
• < 10 ppb moisture contribution
(Qualified per SEMASPEC test
method
#90120397B-STD)
• < 10 ppb THC contribution
(Qualified per SEMASPEC test
method
#90120396B-STD)
• < 10 ppb O2 contribution
(Qualified per SEMASPEC test
method #90120398B-STD)
• ≤ 1 particle/(ft3) contribution above
background

Leak Rating
• 100% helium leak tested to
10-9 atm • cm3/s
• Design validated to 10-11 atm • cm3/s

Packaging
•
•
•
•

Double bagged
Outer bag: aluminized Mylar3
Inner bag: polyethylene
N2 purged

1 VCR is a trademark of Swagelok Co.
2 Particle rating ba