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IL 20000 pages
semiconductor
Development and production
of laser and sorting systems
IL 2000 Wafer Marking System
The Innolas IL 2000 series laser system is designed
to mark various wafer materials with diameters
ranging from 2“ to 200mm.
Different laser types and setups are available to
achieve optimum process results for various materials such as Si, GaAs, Ge, SiC, GaP, InP, Sapphire,
Quartz and others.
A deep or debree free marking process is available. Our application engineers are happy to help you
with the best process setup.
The wafer marking system is controlled by a 19“ industrial PC.
The powerful WindowsTM based software package includes user
friendly operator and engineer interface along with sophisticated
diagnostic features for maintenance and service personal.
Software options include wafer sorting and SECS/GEM host interface. Customized software solutions are available upon request.
