IL 1000 - M0 pages

Development and Production
of laser marking and sorting equipment

IL 1000-M
Manual Wafer Marking System
The Innolas IL 1000-M series laser system is
designed to mark various wafer materials with
diameters ranging from 2“to 200mm.
Different laser types and setups are
Available to achieve optimum process results
for various materials such as Si, GaAs, Ge, SiC,
GaP, InP, Sapphire, Quartz and others.
A deep or debris free marking process is
available. Our application engineers are happy to
help you with the best process setup.
The wafer marking system is controlled by a 19“
industrial PC. The powerful WindowsTM based
software package includes a user friendly
operator and engineer interface along with
sophisticated
diagnostic
features
for
maintenance and service personal.
Easy and cost efficient solution with high
precision for low production volume and
maximum process quality.

Standard Features

Optional Features

- Supports wafer sizes 2” to 200mm
- Wafer drawer station
- Excellent accuracy and repeatability

- Auto Power Controller
- Hand held barcode reader
- Motorized telescope

- Various lasers available to support
all types of materials
(e.g. Si, GaAs, SiC, Sapphire, GaN)