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Development and Production
of laser marking and sorting equipment
IL 4000 Wafer Marking System
The Innolas IL 4000 series laser wafer
marking system is designed to mark wafers
with a diameter of 300 mm or 450 mm.
Different laser types and setups are available
to achieve optimum process results for
different marking processes.
The wafer marking system is controlled by a
19“ industrial PC. The powerful WindowsTM
based software package includes a user
friendly operator and engineer interface
along with sophisticated diagnostic features
for maintenance and service personal.
Software options include wafer sorting and
SECS/GEM host interface. Customized
software solutions are available upon
request.
Standard Features
Optional Features
-
- Auto Power Controller
- Motorized telescope
- SECS/GEM interface
Supports wafer sizes 300 mm and 450 mm
Two loadport stations for FOUP/MAC
High system throughput
Excellent accuracy and repeatability
- Various lasers available to support
deep or debris free marking processes
on silicon wafers
- Wafer ID verification
- Back and front side marking
in a single process step
