IL C 30000 pages

semiconductor

Development and production
of laser and sorting systems

IL C 3000 Wafer Marking System
The Innolas IL C 
3000 is a state of the art class 1
mini environment marking system for 300mm Silicon wafers.
The system allows fully automated laser marking
of polished 300mm wafers in FOUP cassettes using
our debris free processing techniques.
The integrated mini environment has an ionization
unit with laminar flow and pressure control.
The two station system can be loaded by the system
operator or with an OHT (over head transport) system following the SEMI E84 standard.

The unique InnoLas Semiconductor designed 300mm vacuum or
edge grip handling (including aligner) is available. The system offers
marking capability on the front and/or backside of the wafer.
The wafer marking system is controlled by a 19“ industrial PC.
The powerful WindowsTM based software package includes user
friendly operator and engineer interface along with sophisticated
diagnostic features for maintenance and service personal.
Software options include wafer sorting and SECS/GEM host interface. Customized software solutions are available upon request.