Gaskleen® 1 1/8'' C-Seal Gas Purifier0 pages
Gas Filtration Purifiers
nnnnData Sheet A86h
nnnnGaskleen VÁ" C-Seal Gas Purifier
nnnnDescription
nnnnA unique combination of Pall's leading
nnnnedge AresKleen™ purification material,
nnnncombined with Ultramet-L® stainless steel
nnnnfilter medium, creating the Industry's most
nnnnadvanced true point-of-use purifier.
nnnnThe Gaskleen top mount purifier assembly
nnnnis designed to remove homogeneous con-
nnnntamination from process gases to sub ppb
nnnnlevels, while providing 3 nm filtration.
nnnn• Controls and reduces Impurities such
nnnnas O2, H2O, CO2, CO, NMHC, Ni(CO)4
nnnnand Fe(CO)6
nnnn• Assembly hardware is made of 316 L
nnnnstainless steel
nnnn• High efficiency diffusion barrier Insures
nnnnIntegrity of reactive material until in
nnnnservice and upon removal
nnnn• Superior pressure drop characteristics
nnnn• Wide variety of gasses purified
nnnn• 100% helium leak and pressure tested
nnnn• Will not release hydrocarbons
nnnn• Not orientation sensitive
nnnn• No detectable metal contribution
nnnnabove background in HCI gas with
nnnnH CLP material
nnnn• No detectable metal contribution
nnnnabove background in H Br gas with
nnnnHBRP material
nnnnSpecifications
nnnnMaterials
nnnn• Electropolished 316 L stainless steel
nnnnprocess wetted Internal components
nnnn• < 0.13 urn / 5 uin Ra internal surface
nnnnfinish
nnnnParticle Removal Efficiency Rating
nnnn• 1 X 109 retention of particles > 3 nm up
nnnnto 15 slpm
nnnnConnections
nnnn• C-seal, 1%" Interface
nnnnOperating Conditions
nnnn• Maximum operating pressure:
nnnn3.5 MPa @ 100°C/500 psig @ 212°F
nnnn• Maximum operating temperature:
nnnn100°C/212°F (INP, SIP, FCR SF6P),
nnnn40°C / 104°F (NH3R GEH4R OXR CLXP,
nnnnHCLR HBRR CDAP)
nnnn• EU Pressure Equipment Directive:
nnnnAssemblies have been evaluated and
nnnndesigned using SEP per the European
nnnnUnion's Pressure Equipment Directive
nnnn97/23/EC and are not CE marked
nnnnDesign Flow Rate
nnnn• 0-3 slpm @ 0.21 MPa / 30 psig
nnnn• Intermittent flow rates up to
nnnn15 slpm can be accommodated"
nnnnPackaging
nnnn• Double bagged
nnnnOuter bag: alumlnized mylar2
nnnnInner bag: polyethylene
nnnn• Product packaged in argon
nnnnenvironment
nnnnNominal Dimensions
nnnn• Height: 76.2 mm / 3.0 in
nnnn• Base width: 28 mm/1.125 in
nnnn• Shell diameter: 28 mm / 1.125 in
nnnn1 Contact Pall Microelectronics for further
nnnninformation
nnnn2 Mylar is a registered trademark of Dupont Teijin
nnnnFilms, US Limited
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