CM501 Clean Room (Ammonia) Gas Monitor 0 pages
Clean Room (Ammonia) Gas Monitor
for Semiconductor Plants
CM501
Clean Room (Ammonia) Gas Monitor
for Semiconductor Plants
Bulletin 12Y4F1-01E
www.yokogawa.com
CM501
The CM501 continuously and accurately measures ammonia gas or
acid gases in clean rooms; a unique diffusion scrubber shortens the
measurement time and increases the sensitivity. The CM501 monitor
boosts productivity in the semiconductor industry.