Brooks® S122/C122/F122 Series 2 Inch Stainless Steel Gauges0 pages

Brooks® S122/C122/F122 Series
2 Inch Stainless Steel Gauges
»Stainless steel movement providing precision performance
»Variety of models and pressure ranges to support specific
design needs
»316L stainless steel wetted parts
»Gauges welded in oxygen-free chambers to meet rigid
cleanliness and safety guidelines
»1 year warranty
Product Description
The Brooks Instrument Models S122/C122/F122 Series 2 inch
stainless steel gauges were designed and developed for the
demanding high-purity applictions of the semiconductor industry.
With an accuracy of 1% of full scale, the 2 inch gauges offer a
reliable and efficient way to monitor pressure locally. This durable
measuring device comes in a variety of process corrections,
pressure ranges, and socket orientations.
Applications
Gas delivery systems and tools used for semiconductor
processing, including:
• Bulk gas
• Gas cabinets
• Gas distribution
• Gas panels