4800 Series Ultra-Fast Responding Mass Flow Controllers & Meters0 pages

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The Brooks 4800 Series features a broad flow range, compact size, a variety of analog
and digital I/O options, a MEMS-based sensor that provides lightning fast response times,
and many other benefits for a variety of applications. The 4800 Series of mass flow
controllers and mass flow meters is fully RoHS compliant and is an excellent choice for
measurement and control of many common gases including air, N2, O2, Ar, He, H2, CO2,
CO, N2O, CH4, C3H6, and C3H8. The optional Local Operator Interface (LOI) provides a
convenient user interface to view, control, and configure the 4800 Series devices
eliminating the need for remote secondary electronics.
The 4800 Series MEMS-based sensor provides lightning fast response times.
The 4800 Series utilizes a Micro Electro Mechanical System (MEMS) based thermal sensor.
Similar to typical thermal sensors, it measures a change in temperature to determine
mass flow rate. The difference is that gas flows directly across the sensor, achieving
extremely fast response times.
Data Sheet
4800 Series
Thermal Mass Flow
Overview
Product Description
Ultra-Fast Responding
Mass Flow Controllers & Meters
Model 4850
Figure 1 Gas Flow Across the MEMS Sensor