Brooks® Model 5851EM Metal Seal High Flow Mass Flow Controller0 pages

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Data Sheet
DS-TMF-5851EM-MFC-eng
October, 2008
Brooks® Model 5851EM
Brooks® Model 5851EM
Metal Seal High Flow Mass Flow Controller
D Connector
Card Edge
GENERAL FEATURES
• High leak integrity (less than 10-10 atm-cc/sec He)
• Electropolished wetted surfaces (optional)
• Enhanced process (5 Ra avg.) internal surface finish
(optional)
• Normally closed valve (normally open valve optional)
• Particulate free
• High purity VAR 316L Stainless Steel
• High flow capability 100 slpm N2(200 slpm H2)
• Fast response to command changes
• Helium leak check ports
• Class 100 assembly and calibration
• Negligible flow overshoot/undershoot
• Insensitive to mounting attitude
• TTL compatible "valve off" function
• Electrically activated valve override
• Low command flow cutoff
• Available with all popular process connections
• 0(4)-20mA I/O, 24 Vdc power supply (optional)