GF100 Mass Flow Controllers0 pages

GF100 Mass Flow Controllers
High purity digital mass flow controller
»1% digital set point accuracy and <1 second response time
»Multi-gas /multi-range user configurability for optimum
process flexibility and reduced inventory investment
»Independent service port for data-logging and process
development
High Performance Flow Control
The Brooks Instrument GF100 is a robust upgrade for standard
high purity (HP) mass flow controllers, offering improved accuracy
and cleanliness. Optional electrical adapters ensure drop in
compatibility with older style analog flow controllers.
Brooks’ new sensor technology with improved signal to noise
performance and powerful control algorithms deliver enhanced
measurement accuracy and reproducibility for optimal gas
chemistry control.
The GF100 is designed for long-term reliability with embedded
diagnostics and automated zeroing to reduce maintenance for a
lower cost of ownership.
Standard Features
• High purity construction with reduced surface area and removal
of unswept volumes for faster dry-down during purge
- Surface passivated high purity wetted flow path
- 10 ì inch Ra surface finish
• Independent service and diagnostic port for on-tool
troubleshooting and process fingerprinting and optimization
• Integrated high visibility LCD display reports flow (%) and
temperature (°C)
• Analog and Serial (RS-485), analog 0–5 VDC and DeviceNet™
communication interfaces
• Gas and range user configurable
- Multi gas/multi range model created and
proven using actual process gases to
ensure real world accuracy
- Change full scale flow range up to 3:1 for
optimum process and inventory
management flexibility
- Select from hundreds of gases and gas
mixtures
Applications
• Thin-film solar deposition and etch
• c-Si deposition
• Wear resistant surface coatings
• Physical vapor deposition
• MEMS manufacturing
• Fiber optic and glass coating
• Bioreactor gas management
• Flame control
• Gas blending