Brooks® Flomega, Liquid MFC's / MFM's0 pages

Data Sheet
DS-TMF-FM-MFC-eng
April, 2008
Models 5881, 5882, 5891, 5892
1
• Very low liquid flow from 1 to 1000 grams/hour
• Unique thru-flow patented sensor and in-line valve
design
• Assured process accuracy and repeatability
• Long-term reliability, CE certified
• Reduced maintenance
• Improved safety
• Designed, developed, manufactured and supplied
by the first ISO-9001 Quality Certified M&C company
in the world: Brooks Instrument
OPTIONS
• Zone I certified: ATEX approved II 2 GD
EEx d IIB T6 ... T4 T100ºC
• Zone II certified: ATEX approved II 3 GD
EEx nV II T4 T75ºC
• SANITARY (steriliseable) sensor, designed for foodand
pharmaceutical applications
Description
The patented FLOMEGA thru-flow liquid mass flow meter
design is the heart of the system. All models are selfcontained
with signal conditioning electronics and housed
in weather-proof IP-65 certified enclosures.
In addition
the Flomega liquid controller also includes an integrally
mounted control valve and controller
electronics.
Model 5881, Flomega, Mass Flow Controller for Liquid Flow
Application
Flomega liquid mass flow meter for accurate
measurement and in addition as liquid mass flow
controller has been especially designed to measure
and control very low flows of liquid from 1 to 1000
BENEFITS
• Eliminates the necessity of batch processing Higher
productivity
Lower costs
• Virtually insensitive to process temperature,
pressure, density or viscosity changes (specific heat
value dependent).
• High reliability
Ensures proper process recipe
• Verify and calibrate other instruments and provides
consistent process results
• Packaged in rugged enclosure
Insensitive to mounting position
• Easy installation
• Safe with toxic and volatile liquids
• Can be used in many industrial applications
• Applicable for food and pharmaceutical
applications where sterilisation is important
FEATURES
• Continuous mass flow measurement and control for
difficult low liquid flowranges
• Superiour thru-flow design mass flow sensor
• Enhanced performance
• High accuracy and repeatability
• Stand-alone modular design
• Jumper selectable input/output signal configuration
• Closed system
• certified for use in hazardous area Zone I or Zone II
• Sanitary designed sensor
Brooks® Flomega, Liquid MFC's / MFM's