LF200 Series: Ultrasonic Liquid Flow Controller0 pages

Data Sheet

LF Series
Ultrasonic Liquid Flow Controller

Ultrahigh Purity
Liquid Flow Controllers

Model LF200

Overview
Brooks' LF200 Series liquid flow controllers exceed the needs of your most demanding
chemical mechanical planarization and wet chemical processes. Proprietary conical
ultrasonic sensor and signal processing algorithms provide highly accurate and
repeatable flows. A straight flow path, non-intrusive ultrasonic sensor prevents
detrimental impact on delivered fluids (agglomeration of slurry and breakdown of
sensitive chemicals due to shear force). Brooks' unique software takes into account the
dual phase nature of slurry and manages anomalies, including bubbles. Both needle and
pinch valve options are available.

Product
Product Description
Accuracy
Proprietary conical ultrasonic sensor and signal processing algorithms provide 30X
improvement in signal to noise ratio over the competition and enable industry leading
1% set-point accuracy. Even for ultra-low flow rates (<50 ml/min), the Brooks LF200
Series can perform with a repeatability within +/-0.5 ml/min.
point accuracy
Set point accuracy at 50 ml/min FS
55
50

Actual Flow (ml/min)

45
40
35
30
25
20
15
10
5
0
5

10

20

30

40

50

Set-point (ml/min)

1