CMC Series: Capacitance Manometers0 pages

Data Sheet

XacTorr® Series
XacTorr®
Digital Capacitance Manometer

Vacuum Capacitance Manometers

Rugged, Stable
Digital Capacitance Manometers
for Process Vacuum Measurement
Overview
Brooks XacTorr® CMX Series digital vacuum capacitance manometers (also referred to as
capacitance diaphragm gauges) incorporate industry-leading features that improve
measurement reliability, minimize drift, resist diaphragm contamination, and minimize
thermal effects. The result is an exceptionally reliable capacitance manometer family for all
vacuum measurement applications.
An important benefit of the XacTorr vacuum capacitance manometer is its advanced Mark-IV
sensor. The sensor chamber contains surface areas that are not used in the pressure
measurement; these surfaces provide locations for particles and condensable vapors to
accumulate without affecting the sensor, dramatically reducing the need for re-zeroing and
greatly extending sensor life. An optional fast response sensor is available for superior closed
loop control performance. The sensor diaphragm is made from corrosion resistant Inconel®.
Because they are fully digital devices, XacTorr vacuum capacitance manometers operate over
a wide dynamic range with extremely good accuracy.

Product Description
Flexible digital signal processor based electronics eliminates manual potentiometers and
drift associated with the aging of old-style analog electronics.
Digital precision:
• Multi-decade digital calibration provides superior window of “known accuracy”
• Real-time compensation for ambient temperature variations which improves
measurement repeatability
• lntelligent zero adjustment, local push-button, and remote zeroing for ease of
maintenance capability that also improves long-term repeatability
lntelli-Touch zeroing ensures that the XacTorr Series cannot be zeroed if the pressure is too
high or if the capacitance manometer has not reached a stabilized operating temperature
- a common operator error with analog capacitance manometers.
Highly efficient dual-zone temperature control:
• Real-time temperature control of the sensor for improved measurement stability & repeatability
• Fast warm-up with intuitive temperature status LED
• Rapid response to changing system conditions
Unique corrosion resistant, shielded sensor design offers superior protection against condensable
process by-products, which will degrade accuracy and shorten the life of the instrument.

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