SLA6840: Digital, Metal Seal, RT0 pages

Data Sheet
DS-PR-SLA6800-RT-eng
November, 2008

Model SLA6840 EM Series

Delta Class Remote Transducer
Pressure Controller/Flowmeter
General Features:
• All-Metal seals, High leak integrity
(less than 1x10-10 atm-cc/sec He)
• Flow accuracy: ±1% of rate or (setpoint)
including linearity.
• Digital software can store 10 selectable
calibration and flow ranges. Spares
inventories are reduced by limiting the
number of individual MFCs required, lowering
inventory holding costs.
• DeviceNet Protocol.

Model SLA6840A
Analog I/O

Control Response:
• Settling Time of less than 800 ms for all step
changes. Valve response can also be ramped
to tailor MFC performance to process requirements. Actual pressure response can depend
on system design.
• Proprietary Adaptive Valve Control algorithm
assure that unexpected variations in process
conditions do not cause flow to deviate from
setpoint.
• Insensitive to mounting attitude
Analog I/O:
• 15-pin
• 0-5 Volt setpoint and flow signals
• Single sided +15 Volt DC power supply
• Separate ‘valve-override’ signal
• Compatible with Brooks' Model 0150 series
secondary electronics
DeviceNetTM Communication Option:
• Easy Commissioning and Reduced
System Wiring
• Accessibility of sensor, valve, calibration,
tuning, diagnostic, and other internal data,
to support fast commissioning and
streamlining of controller insitu preventive
maintenance.
• MAC-ID, Baudrate rotary switches, and
two bi-color status LEDs - to ease setup and
addressing as well as status confirmation.
• Standard Device-Profile, ODVA certified
Semiconductor-SIG certified
• Capable of: Polled, Cyclic, & Change-of-State
messaging.

Model SLA6840D
Digital I/O
DeviceNet

DESCRIPTION
The Brooks® Model SLA6840 Pressure Controller/Flowmeter controls pressure while also measuring flow rate.
The Model SLA6840 receives a remote pressure transducer signal, and using adjustable integral PID control
electronics and control valve, will maintain a desired set
pressure. In addition to the pressure control function, the
Model SLA6840 provides a 0-5 V signal which is linear
with mass flow rate. The Model SLA6840 can also be
configured as a mass flow controller for calibration or test
purposes.

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