Brooks® Models SLAMf50, SLAMf51, SLAMf53 Mass Flow Controllers and Models SLAMf60, SLAMf61, SLAMf63 Mass Flow Meters0 pages

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Brooks® Digital MFC's and MFM's
Data Sheet
DS-TMF-SLAMf-MFC-eng
November, 2008
Model SLAMf50S
Analog I/O MFC
with RS-485
Model SLAMf53D
Digital I/O
DeviceNetTM MFC
Model SLAMf50F
Digital I/O
FOUNDATION® Fieldbus MFC
General Features:
• Wide FS flow range for measurement and control
of gases from 3 ccm to 2500 lpm, (N2 eq.)
• Accuracy: + 1.0% of rate up to 1100 lpm;
1% FS including linearity above 1100 lpm.
• Industry leading sensor stability. Long term drift
performance of < 0.2% per year. Increased system
throughput by reducing maintenance and eliminating
periodic recipe adjustment.
• Storage of up to 10 selectable calibration curves.
Spares inventories are reduced by limiting the
number of individual MFC/M's required, lowering
inventory holding costs.
• NEMA 4X and IP66 weatherproof protection for
'Hosedown' applications such as: Food, Beverage,
Pharmaceutical and Biotech.
Control Response:
• Settling Time of less than 1 second.
(better on request).
• Soft start can be used to tailor MFC performance to
process requirements.
• Proprietary Adaptive Valve Control algorithm is
available which assures that unexpected variations in
process pressure do not cause flow to deviate from
setpoint.
Analog I/O Option:
• Cable Gland Opening (PG-11)
• Conduit Opening 1/2" NPTF or M20 x 1.5
• 0(1)-5 Volt or 0(4)-20 mA setpoint and flow signals
• Single sided 24 Volt DC power supply
(13.5-27 volts DC range).
• Separate Valve-Override signal
• Precision 5 Volt Reference Output signal
• Compatible with Brooks' Model 0150 series
secondary electronics
• TTL (open collector) Alarm Output signal
Digital Communication Options:
• DeviceNetTM, ODVATM certified
• FOUNDATIONTM Fieldbus, H1 Certified
• HART® based RS-485 multidrop
DESCRIPTION
Brooks Instrument’s SLAMf Series is an elastomer
sealed digital thermal mass flow measurement and
control instrument, which offers unparalleled flexibility
and performance. The SLAMf Series MFC is designed
for use in advanced gas handling systems. The result
is the most accurate, repeatable, and responsive MFC
on the market today!
Brooks® Models SLAMf50, SLAMf51, SLAMf53
Mass Flow Controllers and Models SLAMf60,
SLAMf61, SLAMf63 Mass Flow Meters