SLA6810: Digital, Metal Seal, PC0 pages

Data Sheet
DS-PR-SLA6800-PC-eng
November, 2008

Brooks® Model SLA6800 PC

Brooks® Delta Class Metal-Sealed
Pressure Controllers
Models SLA6810 & SLA6820
General Features:
• Digital software can store 10 selectable
calibration and pressure ranges. Spares
inventories are reduced by limiting the
number of individual PCs required, lowering
inventory holding costs.
• Accuracy: ±0.5% F.S., including linearity
and hysteresis to assure that the Pressure
Controller is controlling precisely at the
level it was set for.
• Available with VCRTM , CS or C-seal Downport
connections - simplifying integration into
existing and/or developing tools and systems
in the semiconductor industry.
• All-Metal seals, High leak integrity
(less than 10-10 atm-cc/sec He)
• Eliminates droop, hysteresis, and boost
DeviceNetTM Communication Option:
• Easy Commissioning and Reduced
System-Wiring
• Accessibility of sensor, valve, calibration,
tuning and diagnostic data
• MAC-ID, Baudrate rotary switches, and
two bi-color status LEDs
• Standard Device-Profile, ODVA
Semiconductor-SIG certified
• Capable of: Polled, Bit-Strobe, Cyclic, &
Change-of-State messaging
Analog I/O:
• 15-pin
• 0-5 Volt command-setpoint
and pressure signals
• Single sided 15 Volt DC power supply
• Separate ‘valve-override’ signal
• Compatible with Brooks' Model 0150 Series
secondary electronics

* Based on data collected determining MTBF for
Model 5964 valve and body.

Models SLA6810A/SLA6820A
Analog I/O,
Pressure Controller
VCRs Upstream

Models SLA6810D /SLA6820D
Digital I/O DeviceNet
Pressure Controller Upstream

Analog I/O Pin Connections:
Signal:
Setpoint/Command Common
Pressure Signal Out
+15V Power
-15V(unused)
Setpoint/Command Input
Power Supply Common
Output Signal Common
+5V reference
Valve Override
Calibration Select Pin
Chassis Ground
No Connections

15-pin D-conn
1
2
5
6
8
9
10
11
12
13
14
3, 4, 7, 15

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