Datasheet Mass Flow Controller SFC4000 for Gases 0 pages

SFC4000 Ultra-Fast CMOSens® Mass Flow Controller for Gases SENSIRION TH SENSOR COMPANY - High accuracy Mass Flow Controller (0.8% of set point for 10 - 100% FS) - Ultra fast settling time (<100ms to within 2% of setpoint) - CMOSens technology - Analog interface (0-5Vdc) - Unipolar Power Supply (14 to 24 Vdc) - Down-mount, VCR, VCO fittings - Digitally calibrated & temperature compensated - NIST traceable calibration - Product I nformati on March 2009 - v25 CMOSens® SFC4000 Product Summary The CMOSens® SFC4000 mass flow controller enables the very fast and accurate control of gas flows over a very wide range. Its leading performance is based on Sensirion's unsurpassed CMOSens® sensor technology which combines a high precision sensor element with the amplification and A/D converter circuit on one single CMOS chip. The digital calibrated and temperature compensated sensor signal is converted directly on the CMOSens® chip into a PWM signal which is used in a fast analog controlling circuit to control the valve. This results in very high accuracy, fast settling time and large dynamic range. The CMOSens® sensor is packed in a vacuum tight stainless steel package which is mounted on a rugged aluminum housing. This makes the SFC4000 mass flow controller the best choice for a wide range of applications, such as mass flow controlling in process control, analytical instrumentation, medical applications, fuel cells, as well as gas flow metrology. The SFC4000 provides analog electrical interfaces for input and output signals (0- 5 V) and requires a standard supply voltage between 14 and 24 VDC. It can be operated at input pressures of up to 10 bar (145 psi). The SFC4000 is the result of intensive optimizations of the Sensirion PC1 mass flow controller. The new SFC4000 is highly compatible to the PC1 and offers even better specifications and a simpler power supply concept. www.sensirion.com Sensirion - the sensor company