RAM-Bar? Magnetics0 pages
RAM-Bar™ Magnetics
Sputtering Components' Remotely Adjustable Magnet Bar or RAM-Bar™ allows customers to adjust
the distance between the magnet pack and the target surface from outside the system during
operation.
FEATURES:
•• Self-contained system
•• Individual adjustment point resolution
of 1/4mm
•• Mode for constant impedance as target
erodes
•• 20mm range of magnet bar movement
•• On-board battery will provide continuous
operation for a 6-week campaign
•• Compatible with SCI's mQRM and QRM
magnet bars
•• Control multiple magnet bars through
the coater PLC or a dedicated computer
RAM-Bar™ Magnetics
BENEFITS:
BENEFITS CONTINUED:
•• In-situ unformity adjustments eliminates
costly system shutdown. No need to
remove the magnet bar for adjustments
to achieve the necessary uniformity or
adapt to changing uniformity during a
campaign
•• Very fine tuning for the most demanding
uniformity requirements
•• Constant impedance mode can reduce
process drift and help stabilize the
deposition rate throughout the lifetime
of the target materials
•• Excellent for keeping constant impedance
using targets up to 20mm material
thickness
•• The batteries are standard rechargeable
Li-Ion packs that can quickly and easily
be swapped out.
Model
RAM-Bar™
Min BT Max Target Adjuster Target Material
Length Diameter
Pitch
Utilization
1m
www.sputteringcomponents.com
172 mm
12" / 305mm
sales@sputteringcomponents.com
Based on type of
magnet bar
Application
Thicker Targets,
High Utilization
Copyright Ⓒ 2014 by Sputtering Components, Inc.
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